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Improved Throughput

Every photon counts – especially for deep ultraviolet (DUV) applications. We offer wavelength-specific DUV processes that yield greater transmission for your short-wavelength semiconductor applications.

Engineered Solutions in Action

Increased UV transmission by improving the manufacturing processes for FS

Optical designers have long worked with ultraviolet (UV) systems, but deep UV applications require special considerations beyond traditional visible optics. As wavelengths decrease, surface smoothness becomes increasingly important for optimal performance. This four-phase project aims to enhance UV optics, starting with characterizing sub-surface damage to improve process control. The second phase, presented here, focuses on polishing methods, followed by cleaning, etching protocols, and finally improving thin film coating performance.

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Optical Systems DUV

Semiconductor: Deep Ultraviolet (DUV)

Optimax’s Laser Grade Optics (LGO) unit produces high-precision, large-diameter optical systems for deep ultraviolet (DUV) laser applications in the semiconductor industry. These optics, with diameters up to 500 mm, are engineered for long life, handling billions of pulses with proprietary low-loss polishing and coating techniques. Operating in a cleanroom facility, the LGO team ensures coating uniformity on complex geometries, meeting the industry’s demands for extreme precision and performance. This transformation enables Optimax to solve challenging problems and deliver solutions for advanced laser applications.

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Semiconductor optics manufacturing

Do you want to find out more?

Optimax creates tailored optical solutions to meet a wide range of needs, with industry-leading custom optics designed by expert engineers. Explore more of our technical papers on innovative optics manufacturing here.

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